683B-29016 | MKS Instruments Type 683 Exhaust Throttle Control Valve
MKS Instruments · Sensors & Instrumentation
Description The MKS Instruments 683B-29016 is a Type 683 exhaust throttle control valve designed for precise pressure regulation in vacuum processing systems. Engineered for controlled modulation of chamber exhaust flow, it maintains stable process pressure in semiconductor and industrial vacuum applications. This valve is built for reliable operation in demanding environments requiring accurate and repeatable vacuum control. Technical Specifications Condition New/Never Used Surplus Brand MKS Instruments Category Vacuum Equipment Part Number 683B-29016 Subcategory Exhaust Throttle Control Valves Series Type 683 Valve Function Exhaust Throttle Control Application Vacuum Pressure Regulation Control Type External Closed-Loop Controller Compatible Installation Inline Vacuum System Integration Process Compatibility Semiconductor & Industrial Vacuum Systems Operating Medium Process Gases / Vacuum Construction Industrial Vacuum-Grade Materials Weight Approx. 6 kg Information About 683B-29016 The 683B-29016 is part of the MKS Type 683 Series exhaust throttle valves developed for closed-loop vacuum pressure control. It is typically integrated with pressure controllers and vacuum gauges to regulate chamber pressure by adjusting exhaust conductance. The valve’s responsive actuation mechanism allows fine modulation to support stable processing conditions in semiconductor fabrication, coating systems, and analytical equipment. Designed for compatibility with high-vacuum environments, it provides dependable operation in applications requiring controlled gas flow and exhaust management. Key Features: Exhaust Throttle Control: Precisely modulates vacuum chamber exhaust flow. Type 683 Series Design: Engineered for stable pressure regulation in vacuum systems. Closed-Loop Compatibility: Works with external pressure controllers for accurate regulation. Fast Response Actuation: Supports rapid adjustment to maintain setpoint pressure. Vacuum Process Application: Suitable for semiconductor, coating, and analytical systems. Stable Pressure Control: Ensures consistent chamber conditions during operation. Industrial-Grade Construction: Built for continuous use in controlled vacuum environments. The 683B-29016 delivers the reliability and precision required for exhaust flow and pressure regulation in advanced vacuum processing systems.
Brand: MKS Instruments · Category: Sensors & Instrumentation
Key features
- Exhaust Throttle Control: Precisely modulates vacuum chamber exhaust flow.
- Type 683 Series Design: Engineered for stable pressure regulation in vacuum systems.
- Closed-Loop Compatibility: Works with external pressure controllers for accurate regulation.
- Fast Response Actuation: Supports rapid adjustment to maintain setpoint pressure.
- Vacuum Process Application: Suitable for semiconductor, coating, and analytical systems.
- Stable Pressure Control: Ensures consistent chamber conditions during operation.
- Industrial-Grade Construction: Built for continuous use in controlled vacuum environments.
Specifications
| Manufacturer part number | 683B-29016 |
|---|---|
| Condition | New/Never Used Surplus |
| Brand | MKS Instruments |
| Category | Vacuum Equipment |
| Part Number | 683B-29016 |
| Subcategory | Exhaust Throttle Control Valves |
| Series | Type 683 |
| Valve Function | Exhaust Throttle Control |
| Application | Vacuum Pressure Regulation |
| Control Type | External Closed-Loop Controller Compatible |
| Installation | Inline Vacuum System Integration |
| Process Compatibility | Semiconductor & Industrial Vacuum Systems |
| Operating Medium | Process Gases / Vacuum |
| Construction | Industrial Vacuum-Grade Materials |
| Weight | Approx. 6 kg |
| Product type | Exhaust Throttle Control Valves |
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